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Oxford Instruments offers flexible process tools and leading-edge processes for the engineering of semiconductor structures and devices, in applications including Sensors, Discrete Devices, Optoelectronics and Nanotechnology. Our systems provide solutions for precise materials deposition, etching of nanometre-sized features and controlled growth of nanostructures, based on core technologies in plasma-enhanced deposition & etch, ion-beam deposition & etch and ALD.